journal article·2019-08Open access

Plasma FIB Spin Milling for 3D Residual Stress Measurements

B. Winiarski, C. Rue, P.J. Withers

Microscopy and Microanalysis· Volume 25· Issue S2

Abstract

Journal Article Plasma FIB Spin Milling for 3D Residual Stress Measurements Get access B Winiarski, B Winiarski Thermo Fisher Scientific, V.Pecha 12, Brno 627 00, Czech RepublicThe Henry Royce Institute, School of Materials, The University of Manchester, M13 9PL, U.K. Corresponding author: Bartlomiej.Winiarski@thermofisher.com Search for other works by this author on: Oxford Academic Google Scholar C Rue, C Rue Thermo Fisher Scientific, 5350 NE Dawson Creek Dr, Hillsboro, OR 97124, USA Search for other works by this author on: Oxford Academic Google Scholar PJ Withers PJ Withers The Henry Royce Institute, School of Materials, The University of Manchester, M13 9PL, U.K. Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 25, Issue S2, 1 August 2019, Pages 882–883, https://doi.org/10.1017/S1431927619005142 Published: 01 August 2019
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Research context

OpenAlex topics: Advanced Surface Polishing Techniques · Integrated Circuits and Semiconductor Failure Analysis · Metal and Thin Film Mechanics

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References (9)

Show source-provided references
1. 10.1016/j.surfcoat.2010.09.03310.1016/j.surfcoat.2010.09.033 ↗
2. 10.1007/s11340-011-9502-310.1007/s11340-011-9502-3 ↗
3. 10.1007/s11661-009-0127-410.1007/s11661-009-0127-4 ↗
4. 10.1016/j.scriptamat.2008.04.03710.1016/j.scriptamat.2008.04.037 ↗
5. 10.1016/j.ultramic.2015.11.00110.1016/j.ultramic.2015.11.001 ↗
6. Winiarski · 3D MS Conference · 2016 · 34
7. 10.1016/j.ultramic.2016.10.01410.1016/j.ultramic.2016.10.014 ↗
8. 10.1038/srep1078910.1038/srep10789 ↗
9. 10.1007/s11340-012-9626-010.1007/s11340-012-9626-0 ↗