Plasma FIB Spin Milling for 3D Residual Stress Measurements
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Abstract
Journal Article Plasma FIB Spin Milling for 3D Residual Stress Measurements Get access B Winiarski, B Winiarski Thermo Fisher Scientific, V.Pecha 12, Brno 627 00, Czech RepublicThe Henry Royce Institute, School of Materials, The University of Manchester, M13 9PL, U.K. Corresponding author: Bartlomiej.Winiarski@thermofisher.com Search for other works by this author on: Oxford Academic Google Scholar C Rue, C Rue Thermo Fisher Scientific, 5350 NE Dawson Creek Dr, Hillsboro, OR 97124, USA Search for other works by this author on: Oxford Academic Google Scholar PJ Withers PJ Withers The Henry Royce Institute, School of Materials, The University of Manchester, M13 9PL, U.K. Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 25, Issue S2, 1 August 2019, Pages 882–883, https://doi.org/10.1017/S1431927619005142 Published: 01 August 2019
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Research context
OpenAlex topics: Advanced Surface Polishing Techniques · Integrated Circuits and Semiconductor Failure Analysis · Metal and Thin Film Mechanics
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (9)
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