journal article·2022-08-01Open access

In situ TEM Study to Unravel Dynamic Processes and Phase Transition During the Synthesis of Ultrathin Crystalline ALD Nanotubes

LM Vogl, P Schweizer, L Pethö, A Sharma, E Spiecker, I Utke, J Michler

Microscopy and Microanalysis· Volume 28· Issue S1

Abstract

Journal Article In situ TEM Study to Unravel Dynamic Processes and Phase Transition During the Synthesis of Ultrathin Crystalline ALD Nanotubes Get access LM Vogl, LM Vogl Laboratory for Mechanics of Materials and Nanostructures, EMPA– Swiss Federal Laboratories for Materials Science and Technology, Thun, Switzerland Corresponding author: Lilian.Vogl@empa.ch Search for other works by this author on: Oxford Academic Google Scholar P Schweizer, P Schweizer Laboratory for Mechanics of Materials and Nanostructures, EMPA– Swiss Federal Laboratories for Materials Science and Technology, Thun, Switzerland Search for other works by this author on: Oxford Academic Google Scholar L Pethö, L Pethö Laboratory for Mechanics of Materials and Nanostructures, EMPA– Swiss Federal Laboratories for Materials Science and Technology, Thun, Switzerland Search for other works by this author on: Oxford Academic Google Scholar A Sharma, A Sharma Laboratory for Mechanics of Materials and Nanostructures, EMPA– Swiss Federal Laboratories for Materials Science and Technology, Thun, Switzerland Search for other works by this author on: Oxford Academic Google Scholar E Spiecker, E Spiecker Institute of Micro-and Nanostructure Research, Friedrich-Alexander University Erlangen-Nürnberg Search for other works by this author on: Oxford Academic Google Scholar I Utke, I Utke Laboratory for Mechanics of Materials and Nanostructures, EMPA– Swiss Federal Laboratories for Materials Science and Technology, Thun, Switzerland Search for other works by this author on: Oxford Academic Google Scholar J Michler J Michler Laboratory for Mechanics of Materials and Nanostructures, EMPA– Swiss Federal Laboratories for Materials Science and Technology, Thun, Switzerland Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 28, Issue S1, 1 August 2022, Pages 2316–2318, https://doi.org/10.1017/S143192762200890X Published: 01 August 2022
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Anodic Oxide Films and Nanostructures · Semiconductor materials and devices · Fluid Dynamics and Thin Films

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Laboratory for Mechanics of Materials and Nanostructures , EMPA– Swiss Federal Laboratories for Materials Science and Technology, Thun, Switzerland

Friedrich-Alexander University Erlangen-Nürnberg Institute of Micro-and Nanostructure Research,

References (15)

Show source-provided references
1. Nesbitt · Ind. Eng. Chem. Res · 2017 · 56 · 1094910.1021/acs.iecr.7b02888 ↗
3. Spende · Nanotechnology · 2015 · 2610.1088/0957-4484/26/33/335301 ↗
4. Lee · Jom · 2010 · 62 · 4410.1007/s11837-010-0058-y ↗
5. Bae · J Mater Chem · 2008 · 18 · 136210.1039/B716652D ↗
6. Juodkazis · Adv. Mater · 2006 · 18 · 136110.1002/adma.200501837 ↗
7. Lu · Philos. Mag. Lett · 2007 · 87 · 40910.1080/09500830701203156 ↗
8. Seshu · Techn. Symposium on Optics Okt · 1990 · 130710.1117/12.21641 ↗
9. Brewer · Phys. Rev. B · 1980 · 22 · 490010.1103/PhysRevB.22.4900 ↗
10. Avouris · Mater. Today · 2006 · 9 · 4610.1016/S1369-7021(06)71653-4 ↗
11. Qamar · Catal. Today · 2008 · 131 · 310.1016/j.cattod.2007.10.015 ↗
12. Thompson · Annu. Rev. Mater. Res · 2012 · 42 · 39910.1146/annurev-matsci-070511-155048 ↗
13. Zhang · J. Phys. Appl. Phys · 2007 · 40 · 370710.1088/0022-3727/40/12/025 ↗
14. Zhou · Acta Mater · 1997 · 45 · 444110.1016/S1359-6454(97)00156-0 ↗
15. Plieth · 2008 · 2710.1016/B978-044452792-9.50004-X ↗