Strain Analysis of FinFET Device Utilizing Moiré Fringes in Scanning Transmission Electron Microscopy
Source abstract
Abstract
Yukihito Kondo, Noriaki Endo, Kei-ichi Fukunaga, Yoshitaka Aoyama, Kyoichiro Asayama, Ching Chun Lin, Hsu Kim; Strain Analysis of FinFET Device Utilizing M
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis · Advancements in Photolithography Techniques
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References (6)
Show source-provided references
1. Proceedings of 32th LSI Testing Symposium · 2012 · p73
2. 10.1063/1.482127810.1063/1.4821278 ↗
3. 10.1063/1.480308710.1063/1.4803087 ↗
4. 10.1017/S143192761400706510.1017/S1431927614007065 ↗
5. 10.1017/S143192761300372310.1017/S1431927613003723 ↗
6. 10.1109/16.8163410.1109/16.81634 ↗