Collection Efficiency of the Twin EDS Detectors for Quantitative X-ray Analysis on A New Probe-Corrected TEM/STEM
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Abstract
Jane Y Howe, Tarunika Ramprasad, Akinari Hanawa, Hiromi Inada, Jose Jimenez, David Hoyle, Edgar Voelkl, Thomas J Zega; Collection Efficiency of the Twin ED
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis · Advancements in Photolithography Techniques
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References (4)
Show source-provided references
1. 10.1017/S143192761600246410.1017/S1431927616002464 ↗
2. 10.1017/S143192761300830110.1017/S1431927613008301 ↗
3. Research supported by NSF grant number 1531243 and NASA grant numbers NNX15AJ22G and NNX12AL47G. The work was carried out at the Kuiper Core Imaging and Microscopy Facility, University of Arizona. We thank Dr. Nestor Zaluzec for the insightful discussions..
4. 10.1017/S143192761400095610.1017/S1431927614000956 ↗