On-line Scanned Probe Microscopy Transparently Integrated with Dual Beam SEM/FIB Systems
Source abstract
Abstract
Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.
Only a short abstract or summary was supplied by the source.
Source: crossref · Quality: short
Research context
OpenAlex topics: Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis · Force Microscopy Techniques and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References
Reference metadata was not supplied for this record.