Evaluation of High-Resolution STEM Imaging Advancement Under Gas-Environment with Open Window MEMS Holder and Gas Injection System

Journal Article Evaluation of High-Resolution STEM Imaging Advancement Under Gas-Environment with Open Window MEMS Holder and Gas Injection System Get access Akinari Hanawa, Akinari Hanawa Science System Product Division, Hitachi High-Technologies Corporation, Hitachinaka, Ibaraki, Japan Corresponding author: akinari.hanawa.gv@hitachi-hightech.com Search for other works by this author on: Oxford Academic Google Scholar Yudai Kubo, Yudai Kubo Science System Product Division, Hitachi High-Technologies Corporation, Hitachinaka, Ibaraki, Japan Search for other works by this author on: Oxford Academic Google Scholar Hideki Kikuchi, Hideki Kikuchi Science System Product Division, Hitachi High-Technologies Corporation, Hitachinaka, Ibaraki, Japan Search for other works by this author on: Oxford Academic Google Scholar Kuniyasu Nakamura, Kuniyasu Nakamura Science System Product Division, Hitachi High-Technologies Corporation, Hitachinaka, Ibaraki, Japan Search for other works by this author on: Oxford Academic Google Scholar Manabu Shirai, Manabu Shirai Science System Product Division, Hitachi High-Technologies Corporation, Hitachinaka, Ibaraki, Japan Search for other works by this author on: Oxford Academic Google Scholar Hiromi Inada, Hiromi Inada Science System Product Division, Hitachi High-Technologies Corporation, Hitachinaka, Ibaraki, Japan Search for other works by this author on: Oxford Academic Google Scholar Hiroaki Matsumoto, Hiroaki Matsumoto Hitachi High-Technologies Co., Ltd., Chao Yang District, Beijing, China Search for other works by this author on: Oxford Academic Google Scholar Masahiro Kawasaki Masahiro Kawasaki Hitachi High-Technologies America Inc., Clarksburg MD, USA Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 25, Issue S2, 1 August 2019, Pages 694–695, https://doi.org/10.1017/S1431927619004203 Published: 01 August 2019