A Piezoelectric Goniometer Inside a Transmission Electron Microscope Goniometer

Abstract Piezoelectric nanoactuators, which can provide extremely stable and reproducible positioning, are rapidly becoming the dominant means for position control in transmission electron microscopy. Here we present a second-generation miniature goniometric nanomanipulation system, which is fully piezo-actuated with ultrafine step size for translation and rotation, programmable, and can be fitted inside a hollowed standard specimen holder for a transmission electron microscope (TEM). The movement range of this miniaturized drive is composed of seven degrees of freedom: three fine translational movements (X,Y, andZaxes), three coarse translational movements along all three axes, and one rotational movement around theX-axis with an integrated angular sensor providing absolute rotation feedback. The new piezoelectric system independently operates as a goniometer inside the TEM goniometer.In situexperiments, such as tomographic tilt without missing wedge and differential tilt between two specimens, are demonstrated.