“Casino V2.0 : An Advance Simulation Tool for Scanning Electron Microscope Users”

Abstract The topic of this paper is to present a new Windows™ environment version of the CASINO Monte Carlo program. The goal of this program is to assist scanning electron microscope users in their routine analysis and also in more advanced topic such as electron beam lithography for example. Based on a single scattering algorithm, this software is specially designed for low beam interaction in a bulk and thin foil. This program uses tabulated Mott elastic cross-sections, which benefit of both fast calculation and accurate interaction at low beam energy. At the moment CASINO can either be used to generate X-rays or backscattered electron signals. The program used simple two-dimension geometry to represent real sample. in this version, vertical and horizontal planes can be generated to allow cross-section representation or multi-layers analysis. Then beam can be scanned across different regions to produce X-ray linescan or bascattered electron profiles. Many new convenient features have been added to the version 2.0 of CASINO. The new interface lets the users to consult the results as the simulation is still in progress.