Multidimensional Sample Surface Analysis by AFM-in-SEM
Source abstract
Abstract
Veronika Novotna, Veronika Hegrova, Josef Horak, Zdenek Novacek, Michal Pavera, Jan Neuman; Multidimensional Sample Surface Analysis by AFM-in-SEM, Microsc
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis · Advanced Electron Microscopy Techniques and Applications
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References (1)
Show source-provided references
1. 10.1017/S143192761900288510.1017/S1431927619002885 ↗