Feature Parameter Design Using Cross-sectional SEM for Machine Learning-based Optimization in Plasma Etching
Source abstract
Abstract
Takashi Dobashi, Hyakka Nakada, Yutaka Okuyama, Takeshi Ohmori; Feature Parameter Design Using Cross-sectional SEM for Machine Learning-based Optimization
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Machine Learning and Algorithms · Machine Learning and Data Classification · Machine Learning and ELM
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References (2)
Show source-provided references
1. 1. Ohmori, T. , , in Proc. Int. Symp. Dry Process, pp. 9–10, 2017.
2. 10.1017/CBO978051180968210.1017/CBO9780511809682 ↗