journal article·2019-08Open access

Low Energy Nano Diffraction (LEND) – Bringing true Diffraction to SEM

Peter Schweizer, Peter Denninger, Christian Dolle, Stefanie Rechberger, Erdmann Spiecker

Microscopy and Microanalysis· Volume 25· Issue S2

Abstract

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Research context

OpenAlex topics: Fluid Dynamics and Thin Films · Nanofabrication and Lithography Techniques · Optical Coatings and Gratings

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References (2)

Show source-provided references
1. 10.1146/annurev-matsci-070511-15504810.1146/annurev-matsci-070511-155048 ↗
2. 10.1126/sciadv.aat471210.1126/sciadv.aat4712 ↗