Analytical STEM-in-SEM: Towards Rigorous Quantitative Imaging
Source abstract
Abstract
Is there an optimal acceptance angle range for quantitative imaging? How easily can elements spanning the periodic table be discerned? Will Pt films always exhibit stronger contrast against vacuum levels than C films if both are the same nominal thickness? Can films of neighboring elements (i.e., Ni and Co) and similar thickness be discerned?
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis
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References (12)
Show source-provided references
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