Tomographic measurement of buried interface roughness
Source abstract
Abstract
Misa Hayashida, Shinichi Ogawa, Marek Malac; Tomographic measurement of buried interface roughness, Microscopy and Microanalysis, Volume 21, Issue S3, 1 Au
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Non-Destructive Testing Techniques · Integrated Circuits and Semiconductor Failure Analysis
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References (2)
Show source-provided references
1. 10.1016/j.ultramic.2014.04.00510.1016/j.ultramic.2014.04.005 ↗
2. Microscopy and Microanalysis · 2013 · 19 · 139410.1017/S1431927613008969 ↗