journal article·2005-08Open access

The FIB/SEM Technique, Atomic Force Microscopy and Acoustic Microscopy for Detection of Subsurface Defects in Thin DLC Coatings

P V Zinin, M H Manghnani, S Berezina, B Koehler, K Bernland, D Fei, D A Rebinsky

Microscopy and Microanalysis· Volume 11· Issue S02

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Metal and Thin Film Mechanics · Force Microscopy Techniques and Applications · Advanced Surface Polishing Techniques

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References

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