Quantifying Low-keV Beam Damage in Ultrathin MFI Zeolite Nanosheets with an SEM
Source abstract
Abstract
Abstract This manuscript demonstrates the susceptibility of ultrathin Mobil Five (MFI) zeolite nanosheets to low-keV electron beam damage in a scanning electron microscope (SEM). Beam dose rates and characteristic beam doses are quantified at beam energies from 15 to 30 keV using an on-axis transmission electron detector to measure signal decay times in diffraction patterns and by underfocusing to enable spot size measurement. Characteristic beam doses ranged from approximately 1.9 C/cm2 at 15 keV to 14 C/cm2 at 30 keV, and the damage mechanism was attributable to radiolysis but other processes including electrostatic charging and sputtering could not be ruled out.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Ion-surface interactions and analysis · Advanced Electron Microscopy Techniques and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Applied Chemicals and Materials Division, Materials Measurement Laboratory, National Institute of Standards and Technology (NIST) , 325 Broadway, MS 647, Boulder, CO 80305 , USA
References (29)
Show source-provided references
1. On-axis transmission Kikuchi diffraction for orientation mapping of nanocrystalline materials in the SEM10.1017/S1431927617003336 ↗
2. Transmission imaging with a programmable detector in a scanning electron microscope10.1016/j.ultramic.2018.09.006 ↗
3. Orientation mapping of graphene using 4D STEM-in-SEM10.1016/j.ultramic.2020.113137 ↗
4. Imaging beam-sensitive materials by electron microscopy10.1002/adma.201907619 ↗
5. Inelastic electron irradiation damage in hexagonal boron nitride10.1016/j.micron.2015.02.002 ↗
6. Damage of zeolite Y in the TEM and its effects on TEM images10.1016/0304-3991(87)90253-1 ↗
7. Experimental Characterization and Mitigation of Specimen Charging on Thin Films with One Conducting Layer10.1017/S143192760404067X ↗
8. Mechanisms of radiation damage in beam-sensitive specimens, for TEM accelerating voltages between 10 and 300 kV10.1002/jemt.22099 ↗
9. Radiation damage to organic and inorganic specimens in the TEM10.1016/j.micron.2019.01.005 ↗
10. Radiation damage in the TEM and SEM10.1016/j.micron.2004.02.003 ↗
11. Basic questions related to electron-induced sputtering in the TEM10.1016/j.ultramic.2009.11.003 ↗
12. Beam-induced damage to thin specimens in an intense electron probe10.1017/S1431927606060065 ↗
13. Considerable knock-on displacement of metal atoms under a low energy electron beam10.1038/s41598-017-00251-3 ↗
14. Obtaining diffraction patterns from annular dark-field STEM-in-SEM images: Towards a better understanding of image contrast10.1016/j.ultramic.2020.112972 ↗
15. Electron beam ionization damage processes in p-terphenyl10.1080/13642818508240634 ↗
16. Analysis of complex, beam-sensitive materials by transmission electron microscopy and associated techniques
17. Electron beam excitation and damage of biological molecules; Its implications for specimen damage in electron microscopy10.2307/3573678 ↗
18. Ultra-selective high-flux membranes from directly synthesized zeolite nanosheets10.1038/nature21421 ↗
19. Beam damage by the induced electric field in transmission electron microscopy10.1016/j.micron.2016.02.007 ↗
20. STEM-in-SEM: A re-emerging material measurement approach
21. TSEM: A review of scanning electron microscopy in transmission mode and its applications10.1016/B978-0-12-394297-5.00006-4 ↗
22. Quantification of thickness and wrinkling of exfoliated two-dimensional zeolite nanosheets10.1038/ncomms8128 ↗
23. Automated transmission-mode scanning electron microscopy (tSEM) for large volume analysis at nanoscale resolution10.1371/journal.pone.0059573 ↗
24. Detectors—The ongoing revolution in scanning transmission electron microscopy and why this important to material characterization10.1063/5.0026992 ↗
25. Crystal structure and structure-related properties of ZSM-510.1021/j150615a020 ↗
26. Orekhov · 2020
27. Low-dose high-resolution electron microscopy of zeolite materials with a slow-scan CCD camera10.1016/0304-3991(93)90108-A ↗
28. Radiolysis to knock-on damage transition in zeolites under electron beam irradiation10.1103/PhysRevB.83.113408 ↗
29. Control of radiation damage in MoS2 by graphene encapsulation10.1021/nn4044035 ↗