Use of Partial Scattering EDX Cross-Sections to Quantify Light Elements in the STEM

Energy dispersive X-ray spectroscopy (EDX) is a versatile tool within the scanning transmission electron microscope (STEM). Qualitative chemical maps may be obtained with good spatial resolution and relatively little effort for many samples, in contrast with the more labour-intensive data processing required to produce elemental maps using e.g. electron energy loss spectroscopy (EELS).