Analysis of Thin Film Specimens Using ToF-SIMS Wedge Protocol, A Comparison with Depth Profiling
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Source: openalex_inverted_index · Quality: short
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OpenAlex topics: Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis · Diamond and Carbon-based Materials Research
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References (7)
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1. Keenan “A Complete Characterization of Samples Using Multivariate Statistical Analysis of 3Dimensional MCs+ ToF-SIMS Data” Microsc10.1017/S143192761100818X ↗
2. “MCs+ Depth Profiling Using Cluster Primary Ions”10.1002/sia.3465 ↗
3. H. Arlinghaus “Using ToF-SIMS to Study Industrial Surface Phenomena”10.1016/j.susc.2016.02.017 ↗
4. Cesium/xenon dual beam depth profiling with TOF-SIMS: measurement and modeling of M+, MCs+, and M2Cs2+ yields10.1016/j.apsusc.2004.03.048 ↗
5. Vickerman · 200910.1002/9780470721582 ↗
6. Hofmann · 2011
7. “Molecular Depth Profiling by Wedge Crater Beveling”;10.1021/ac201502w ↗