Analysis of the Dose-Limited Spatial Resolution in Transmission Electron Microscopy
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Abstract
Eduardo Ortega, Niels de Jonge; Analysis of the Dose-Limited Spatial Resolution in Transmission Electron Microscopy, Microscopy and Microanalysis, Volume 2
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Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis
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References (5)
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1. 10.1016/0304-3991(93)90065-610.1016/0304-3991(93)90065-6 ↗
2. 10.1016/j.ultramic.2018.01.00710.1016/j.ultramic.2018.01.007 ↗
3. Reimer · 2008
4. [5] The authors thank E. Arzt for his support through INM. The research was supported by the German Research Foundation.
5. 10.1016/j.ultramic.2010.04.00110.1016/j.ultramic.2010.04.001 ↗