Toward Automated S/TEM Metrology of Advanced CMOS Devices: Journey to Obtain a Precise and Accurate Measurement
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Abstract
Weihao Weng, Haiyan Tan, Ahmad Katnani; Toward Automated S/TEM Metrology of Advanced CMOS Devices: Journey to Obtain a Precise and Accurate Measurement, Mi
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Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis · Surface and Thin Film Phenomena
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References (2)
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1. Thiel · Conference Proceedings · 2011 · 1395 · 298
2. Acknowledgements: The authors thank Zhibin Ren (IBM assignee at GF) for providing test structures. The authors also thank Christopher Hakala (GF), Matthew Lamberti (GF), Raghaw Rai (GF), Frieder Baumann (GF), Taher Kagalwala (GF), Georgios Vakas (GF), Alok Vaid (GF), Eric Solecky (GF), Irene Brooks (GF), Laurent Dumas (GF), Edward Crawford (GF) and Paul Van Der Heide (GF) for valuable discussions. Furthermore the authors thank Gavin Dutrow (Thermo Fisher Scientific) and Mauricio Gordillo (Thermo Fisher Scientific) for assistance in recipe writing.