Viability of Point Spread Function Deconvolution for SEM
Source abstract
Abstract
Mandy C Nevins, Richard K Hailstone, Matthew D Zotta, Eric Lifshin; Viability of Point Spread Function Deconvolution for SEM, Microscopy and Microanalysis,
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advancements in Photolithography Techniques · Advanced Electron Microscopy Techniques and Applications
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References (2)
Show source-provided references
1. 10.1017/S143192761400365110.1017/S1431927614003651 ↗
2. The authors acknowledge Nanojehm for the Aura Workstation beta unit on loan.