Thin Film Porosity Determined by X-Rays at SEM
Source abstract
Abstract
E Ortel, R Kraehnert, F Galbert, V-D Hodoroaba; Thin Film Porosity Determined by X-Rays at SEM, Microscopy and Microanalysis, Volume 21, Issue S3, 1 August
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Advancements in Photolithography Techniques
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References (5)
Show source-provided references
1. 10.1002/sia.497510.1002/sia.4975 ↗
2. 10.1007/s00604020002010.1007/s006040200020 ↗
3. 10.1007/s00216-002-1514-510.1007/s00216-002-1514-5 ↗
4. 10.1017/S143192760707020110.1017/S1431927607070201 ↗
5. 10.1002/smll.20110152010.1002/smll.201101520 ↗