Large volume 3D characterization by plasma FIB DualBeam microscopy
Source abstract
Abstract
T L Burnett, R Kelley, B Winiarski, M Daly, K Mani, P J Withers; Large volume 3D characterization by plasma FIB DualBeam microscopy, Microscopy and Microan
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Advanced Electron Microscopy Techniques and Applications · Electron and X-Ray Spectroscopy Techniques
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