journal article·2022-08-01

New Product Announcement – LEAP 6000XR, New Applications, New Performance

Robert Ulfig, Daniel Lenz, Gard Groth, Joseph H Bunton, Isabel Martin, Ty J Prosa, David A Reinhard, Peter H Clifton, Brian P Geiser, David J Larson

Microscopy and Microanalysis· Volume 28· Issue S1
Publisher page

Abstract

Journal Article New Product Announcement – LEAP 6000XR, New Applications, New Performance Get access Robert Ulfig, Robert Ulfig CAMECA Instruments Inc., Madison, WI, USA Corresponding author: Robert.Ulfig@AMETEK.com Search for other works by this author on: Oxford Academic Google Scholar Daniel Lenz, Daniel Lenz CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Gard Groth, Gard Groth CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Joseph H Bunton, Joseph H Bunton CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Isabel Martin, Isabel Martin CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Ty J Prosa, Ty J Prosa CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar David A Reinhard, David A Reinhard CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Peter H Clifton, Peter H Clifton CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Brian P Geiser, Brian P Geiser CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar David J Larson David J Larson CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 28, Issue S1, 1 August 2022, Pages 3190–3191, https://doi.org/10.1017/S1431927622011849 Published: 01 August 2022
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Research context

OpenAlex topics: Advanced Materials Characterization Techniques · Integrated Circuits and Semiconductor Failure Analysis · Electron and X-Ray Spectroscopy Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

CAMECA Instruments Inc. , Madison, WI, USA

References (3)

Show source-provided references
1. Kelly · Micros Microanal · 2011 · 17 · 110.1017/S1431927610094468 ↗
2. Larson · Micros. Microanal · 2014 · 20 · 208810.1017/S1431927614012173 ↗
3. Birdseye · Surf. Sci · 1970 · 23 · 19810.1016/0039-6028(70)90013-0 ↗