Evaluation of Lattice-Spacing of SiGe/Si by NBD using Two-condenser-lens TEM
Source abstract
Abstract
Junji Yamanaka, Takuya Oguni, Yuichi Sano, Yusuke Ohshima, Atsushi Onogawa, Kosuke O Hara, Keisuke Arimoto; Evaluation of Lattice-Spacing of SiGe/Si by NBD
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Advanced Electron Microscopy Techniques and Applications · Electron and X-Ray Spectroscopy Techniques
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Affiliations
University of Yamanashi, Center for Inst. Analysis , Kofu, Japan
University of Yamanashi , Center for Cry. Sci. & Tech., Kofu, Japan
References
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