A Study of Gallium FIB induced Silicon Amorphization using TEM, APT and BCA Simulation
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Abstract
Jin Huang, Markus Loeffler, Uwe Muehle, Wolfhard Moeller, Hans Mulders, Laurens Kwakman, Ehrenfried Zschech; A Study of Gallium FIB induced Silicon Amorphi
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Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis · Advanced Surface Polishing Techniques
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References (6)
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