Xe Plasma FIB-SEM with Improved Resolution of Both Ion and Electron Columns
Source abstract
Abstract
J Jiruse, M Havelka, J Polster, T Hrncif; Xe Plasma FIB-SEM with Improved Resolution of Both Ion and Electron Columns, Microscopy and Microanalysis, Volume
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Ion-surface interactions and analysis · Electron and X-Ray Spectroscopy Techniques · Advanced Materials Characterization Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (5)
Show source-provided references
1. Microsc. and Microanal · 2013 · 19 · 86010.1017/S1431927613006296 ↗
2. 10.1017/S143192761400321310.1017/S1431927614003213 ↗
3. Microsc. Microanal. · 2012 · 18 · 638
4. 10.1116/1.489750210.1116/1.4897502 ↗
5. Proceedings of 38th Int. Symp. for Testing and Failure Analysis ISTFA · 2012 · 26