Characterization of 3D Dopant Distribution in State of the Art FinFET Structures
Source abstract
Abstract
Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.
Only a short abstract or summary was supplied by the source.
Source: crossref · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advancements in Photolithography Techniques · Advanced Materials Characterization Techniques
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References
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