DataVXMicroscopy and MicroanalysisPaper
journal article·2010-07Open access

Nanofabrication with a High Resolution Helium Ion Beam

E van Veldhoven, V Sidorkin, P Chen, P Alkemade, E van der Drift, H Salemink, HW Zandbergen, D Maas

Microscopy and Microanalysis· Volume 16· Issue S2
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Source abstract

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.
Only a short abstract or summary was supplied by the source.
Source: crossref · Quality: short

Research context

Nanomaterials

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques

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