SIMS on the Helium Ion Microscope: a Powerful Tool for High-Resolution High-Sensitivity Nano-Analytics
Source abstract
Abstract
Tom Wirtz, David Dowsett, Jean-Nicolas Audinot, Santhana Eswara; SIMS on the Helium Ion Microscope: a Powerful Tool for High-Resolution High-Sensitivity Na
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis · Electron and X-Ray Spectroscopy Techniques
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References (5)
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1. 10.1016/j.apsusc.2013.06.08810.1016/j.apsusc.2013.06.088 ↗
2. 10.1088/0957-4484/26/43/43400110.1088/0957-4484/26/43/434001 ↗
3. J. Vac. Sci. Technol · 2012 · B 30 · 06F602
4. 10.1016/j.ijms.2006.02.01810.1016/j.ijms.2006.02.018 ↗
5. Appl. Surf. Sci. 231- · 2004 · 232 · 940