Ar+ FIB Milling and Measurement of FIB Damage in Silicon
Source abstract
Abstract
Brandon Van Leer, Huikai Cheng, Mikhail Dutka; Ar+ FIB Milling and Measurement of FIB Damage in Silicon, Microscopy and Microanalysis, Volume 25, Issue S2,
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Advanced Surface Polishing Techniques · Metal and Thin Film Mechanics
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (3)
Show source-provided references
1. JF Ziegler and JP Biersack , SRIM 2003, www.SRIM.com.
2. Giannuzzi · Microscopy and Microanalysis · 2005 · 11
3. Van Leer · Microscopy and Microanalysis · 2013