DataVXMicroscopy and MicroanalysisPaper
journal article·2019-08Open access

Using a Plasma FIB Equipped with Xe, N2, O2 and Ar for Atom Probe Sample Preparation – Ion Implantation and Success Rates

Katja Eder, Vijay Bhatia, Brandon Van Leer, Julie M. Cairney

Microscopy and Microanalysis· Volume 25· Issue S2
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Abstract

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Research context

Biomaterials

OpenAlex topics: Advanced Materials Characterization Techniques · Ion-surface interactions and analysis · Metal and Thin Film Mechanics

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References (3)

Show source-provided references
1. 10.1016/j.nimb.2010.02.09110.1016/j.nimb.2010.02.091 ↗
2. Gault · Atom Probe Microscopy
3. Tesch · 7