Hard X-ray In-situ Full-field Microscopy for Material Science Applications.

Hard X-ray transmission microscopy (HXTM) based on refractive X-ray optics was employed as an instrument in material science to investigate buried-in microstructures in two or three dimensions with spatial resolution approaching 100 nm In this microscope, the incoming beam goes through the condenser, and illuminates the sample. The objective lens magnifies the image of the sample on the highresolution CCD camera (pixel size 0.65 m). The X-ray magnification typically lies in the 5-100 range but is not strictly limited. With the extra magnification from X-ray optics, the maximum spatial resolution is no longer limited by the detector pixel size, but by the X-ray optics. The main factors influencing the spatial resolution are the numerical aperture and aberrations of objective lens.