Applications of an in-situ Low Energy Argon Ion Source for Improvement of TEM and SEM Sample Quality
Source abstract
Abstract
Anna Prokhodtseva, Johannes Mulders, Tomas Vystavel; Applications of an in-situ Low Energy Argon Ion Source for Improvement of TEM and SEM Sample Quality,
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Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis
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References (1)
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1. Mulders Johannes & Trompenaars Piet An in-situ Low Energy Argon Ion Source for Local Surface Modification. The 16th European Microscopy Congress, Lyon, France.