SEM Autofocusing and Astigmatism Correction using FFT and GPGPU techniques
Source abstract
Abstract
Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.
Only a short abstract or summary was supplied by the source.
Source: crossref · Quality: short
Research context
OpenAlex topics: Image Processing Techniques and Applications · Force Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References
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