Removal of Ga Implantation on FIB-prepared Atom Probe Specimens Using Small Beam and Low Energy Ar+ Milling

C.S. Bonifacio; K.P. Rice; T.J. Prosa; M. Ray; T.F. Kelly; P.E. Fischione

doi:10.1017/s1431927618006074

journal article·2018-08Open access

Removal of Ga Implantation on FIB-prepared Atom Probe Specimens Using Small Beam and Low Energy Ar+ Milling

C.S. Bonifacio, K.P. Rice, T.J. Prosa, M. Ray, T.F. Kelly, P.E. Fischione

Microscopy and Microanalysis· Volume 24· Issue S1

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Abstract

CS Bonifacio, KP Rice, TJ Prosa, M Ray, TF Kelly, PE Fischione; Removal of Ga Implantation on FIB-prepared Atom Probe Specimens Using Small Beam and Low En

Only a short abstract or summary was supplied by the source.

Source: openalex_inverted_index · Quality: short

Research context

Biomaterials

OpenAlex topics: Advanced Materials Characterization Techniques · Integrated Circuits and Semiconductor Failure Analysis · Diamond and Carbon-based Materials Research

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References (5)

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