Measurement of the Electron Beam Point Spread Function (PSF) in a Scanning Electron Microscope (SEM)
Source abstract
Abstract
Yudhishthir P Kandel, Matthew D Zotta, Andrew N Caferra, Richard Moore, Eric Lifshin; Measurement of the Electron Beam Point Spread Function (PSF) in a Sca
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advancements in Photolithography Techniques · Surface Roughness and Optical Measurements
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (8)
Show source-provided references
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