The Influence of Beam Convergence Angle on Channeling Effect during STEM/EDS Quantification of SiGe Concentration
Source abstract
Abstract
B Fu, M Gribelyuk, R Scott, E Chen, J Riendeau; The Influence of Beam Convergence Angle on Channeling Effect during STEM/EDS Quantification of SiGe Concent
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis · Electronic and Structural Properties of Oxides
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References (4)
Show source-provided references
1. 10.1016/j.tsf.2010.07.10410.1016/j.tsf.2010.07.104 ↗
2. Microsc. Microanal. · 2009 · 15 · 83
3. ECS Transactions · 2010 · 33 · 3
4. 10.1063/1.480418410.1063/1.4804184 ↗