journal article·2007-08

Strain Measurements Using Nano-Beam Diffraction on a FE-STEM

C Vartuli, K Jarausch, H Inada, R Tsuneta, D Dingley, E Marley

Microscopy and Microanalysis· Volume 13· Issue S02
Publisher page

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Electron and X-Ray Spectroscopy Techniques · Advanced Surface Polishing Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References

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