Enhanced Quantification for 3D Energy Dispersive Spectrometry: Going Beyond the Limitation of Large Volume of X-Ray Emission
Source abstract
Abstract
Abstract This paper presents a method developed to quantify three-dimensional energy dispersive spectrometry (3D EDS) data with voxel size smaller than the volume from which X-rays are emitted. The influence of the neighboring voxels is corrected by applying recursively a complex quantification, improving thereby the accuracy of the quantification of critically small features. The enhanced quantification method is applied to simulated and measured data. A systematic improvement is obtained compared with classical quantification, proving the concept and the prospect of this method.
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Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · X-ray Spectroscopy and Fluorescence Analysis · Nuclear Physics and Applications
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References (28)
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