X-ray Microanalysis of a Coated Nonconductive Specimen: Monte Carlo Simulation
Source abstract
Abstract
The microanalysis of nonconductive specimen in a scanning electron microscope is limited by charging effects. Using a charge density model for the electric field buildup in a nonconductive specimen irradiated by electrons, a Monte Carlo simulation method has been applied to alumina (Al2O3). The results show a change in the depth distribution for characteristic and bremsstrahlung X-ray, φ(ρz) curves, and ψ(ρz) curves (with absorption) for both elements' Kα lines. The influence of the electric field on the measured X-ray intensity is shown. The dependency of this influence by the three parameters, electron energy, X-ray energy, and charge density, is clarified.
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Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · X-ray Spectroscopy and Fluorescence Analysis · Advancements in Photolithography Techniques
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References (15)
Show source-provided references
1. Kotera, M. & Suga, H. (1988).A simulation of keV electron scatterings in a charged-up specimen.J Appl Phys 78,261–268.10.1063/1.340285 ↗
2. Demers, H. (2002).Les effets de charges pour un échantillon isolant dans unmicroscope électronique à balayage.Master's thesis,Université de Sherbrooke.
3. Odof, S. (2000).Microanalyse X des Isolants: Simulations de Monte Carlo.Ph.D. thesis,Université de Reims Champagne-Ardenne.
4. Gray, C.C. , Chapman, J.N. , Nicholson, W.A.P. , Robertson, B.W. , & Ferrier, R.P. (1983).X-ray production in thin films by electrons with energies between40 and 100 keV: 2—Characteristic cross-sections and the overallX-ray spectrum.X-ray Spectrom 12,163–169.10.1002/xrs.1300120408 ↗
5. Sorbier, L. (2001).Apport de la Simulation dans l'Optimisation de l'AnalyseQuantitative par Microsonde Électronique de CatalyseursHétérogènes,Ph.D. thesis,Université de Montpellier II.
6. Casnati, E. , Tartari, A. , & Baraldi, C. (1982).An empirical approach to K-shell ionisation cross section byelectrons.J Phys B 15,155–167.10.1088/0022-3700/15/1/022 ↗
7. Cazaux, J. (1996).Electron probe microanalysis of insulating materials:Quantification problems and some possible solutions.X-Ray Spectrom 25,1–16.
8. Kanaya, K. & Okayama, S. (1972).Penetration and energy-loss theory of electrons in solid targets.J Phys D: Appl Phys 5,43–58.10.1088/0022-3727/5/1/308 ↗
9. Bielajew, A. & Rogers, D. (1988).Electron transport in E and B fields. InMonte Carlo Transport of Electrons and Photons, Jenkins, T.M. , Nelson, R. & Rindi, A. (Eds.), pp.421–434.New York, London:Plenum Press.10.1007/978-1-4613-1059-4_19 ↗
10. Jbara, O. , Portron, B. , Mouze, D. , & Cazaux, J. (1997).Electron probe microananlysis of insulating oxides: Monte Carlosimulations.X-Ray Spectrom 26,291–302.10.1002/(SICI)1097-4539(199709)26:5<291::AID-XRS226>3.0.CO;2-X ↗
11. Bastin, G.F. & Heijligers, H.J.M. (1991).Nonconductive specimens in the electron probe microanalyzer: Ahitherto poorly discussed problem. InElectron Probe Quantitation, Heinrich, K.F.J. & Newbury, D.E. (Eds.), p. 193.New York:Plenum Press.
12. Joy, D.C. & Luo, S. (1989).An empirical stopping power relationship for low-energy electrons.Scanning 11,176.10.1002/sca.4950110404 ↗
13. Hovington, P. , Drouin, D. , & Gauvin, R. (1997).CASINO: A new Monte Carlo code in C language for electron beaminteraction—Part I: Description of the program.Scanning 19,1–14.10.1002/sca.4950190101 ↗
14. Henke, B.L. , Gullikson, E.M. , & Davis, J.C. (1993).X-ray interactions: Photoabsorption, scattering, transmission, andreflection at E=50–30000 eV, Z=1–92.At Data Nucl Data Tables 54,181–342.10.1006/adnd.1993.1013 ↗
15. Czyzewski, Z. , MacCallum, D.O. , Romig, A. , & Joy, D.C. (1990).Calculation of Mott scattering cross section.J Appl Phys 68,3066–3072.10.1063/1.346400 ↗