Surface Damage In Silicon After 30 Kev Ga Fib Fabrication
Source abstract
Abstract
S Rubanov, PR Munroe, S Prawer, DN Jamieson; Surface Damage In Silicon After 30 Kev Ga Fib Fabrication, Microscopy and Microanalysis, Volume 9, Issue S02,
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Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Advanced Electron Microscopy Techniques and Applications · Electron and X-Ray Spectroscopy Techniques
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References
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