The New Form Of The Zeta-Factor Method For Quantitative Microanalysis In Aem-Xeds And Its Evaluation

Abstract For quantitative thin-film microanalysis using X-ray energy dispersive spectrometry (XEDS) in analytical electron microscopy (AEM) the Cliff-Lorimer ratio technique is widely applied. One of the critical steps in the ratio technique is to determine the aiff-Lorimer k factor relating the characteristic X-ray intensities to the compositions. The k factor can be determined experimentally with the relative error of ˜ ± 1%. So, the most accurate quantification can be performed using the experimental k factors. To determine the k factors experimentally, standard thin-filrns with known composition are required. Unfortunately, this is not always possible because such the standards may not be available. Even if all standards are available, many k factors should be determined in multi-component system. This is time consuming. These limitations in k-factor determination make thin-film quantification harder. This paper presents a new quantitative procedure for thin specimens to overcome these limitations.