Dopant Site Occupancy Determined by Core-Loss-Filtered, Position-Averaged Convergent Beam Electron Diffraction

Abstract In the elastic scattering regime, probe position-averaged convergent beam electron diffraction (PACBED) patterns have proven robust for estimating specimen thickness and mistilt. Through simulation, we show that core-loss-filtered PACBED patterns can be used to measure the site occupancy of a small concentration of dopants in an otherwise known crystal structure. By leveraging the reciprocity between scanning and conventional transmission electron microscopy, we interpret core-loss PACBED patterns using a strategy traditionally used for determining dopant concentrations via energy dispersive X-ray spectroscopy. We show that differences in the interaction range of different elements hinder a purely measurement-based quantification strategy, but that this can be overcome through comparison with simulations that generalize the Cliff–Lorimer k-factors.