journal article·2025-07-25

Unraveling the Mechanism of Phase Segregation Phenomena in IGZO Compounds via Precession Electron Diffraction and In-Situ TEM

Marta Agati, Pradyumna K Parida, Harold Dekkers, Athanassios S Galanis, Olivier Richard, Eva Grieten, Paola Favia

Microscopy and Microanalysis· Volume 31· Issue Supplement_1
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Abstract

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Research context

OpenAlex topics: Thin-Film Transistor Technologies · ZnO doping and properties · Semiconductor materials and interfaces

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Affiliations

Imec , Leuven ,

NanoMegas , Brussels ,

References (4)

Show source-provided references
1. Belmonte · IEEE International Electron Devices Meeting (IEDM) · 2021
2. Dekkers · ACS Appl. Electron. Mater. · 2022 · 4 · 123810.1021/acsaelm.1c01315 ↗
3. Vincent · Ultramicroscopy · 1994 · 53 · 27110.1016/0304-3991(94)90039-6 ↗
4. Alet · J. Mater. Chem. · 2008 · 18 · 518710.1039/B813046A ↗