Stress-Driven Disproportionation in Oxygen Containing Silicon Nitride Membrane

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Research context

OpenAlex topics: Mechanical and Optical Resonators · Analytical Chemistry and Sensors · Diamond and Carbon-based Materials Research

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Affiliations

Department of Materials Science and Engineering, Northwestern University , Evanston, IL ,

The NUANCE Center, Northwestern University , Evanston, IL ,

School of Materials Science and Engineering, Pusan National University , Busan ,

References (2)