The Effects of Plasma Cleaning on Carbon and Hydrocarbon-contaminated Samples and Quantification of Decontamination in the Scanning Electron Microscope

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques

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Affiliations

XEI Scientific, Inc. , Redwood City, California ,

NanoProto Technologies , Merrimack, New Hampshire ,

Nanotools GmbH , Munich ,

References (4)