Annealing Optimization for HZO Thin Films with In-Situ STEM EBIC Characterization
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Research context
OpenAlex topics: Ferroelectric and Negative Capacitance Devices · Semiconductor materials and devices · Electronic and Structural Properties of Oxides
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Affiliations
Department of Physics and Astronomy, University of California , Los Angeles, CA ,
California NanoSystems Institute (CNSI), University of California , Los Angeles, CA ,
Department of Material Science and Engineering, University of Virginia , Charlottesville, VA ,
NanoElectronic Imaging, Inc., Los Angeles, CA, U.S.A.
Charles L. Brown Department of Electrical and Computer Engineering, University of Virginia , Charlottesville, VA, U.S.A.