3D Imaging of Defects, Buried Interfaces, and Strain with Multislice Electron Ptychography
Abstract
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Research context
OpenAlex topics: Advanced Electron Microscopy Techniques and Applications · Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis
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Affiliations
School of Applied and Engineering Physics, Cornell University , Ithaca, NY ,
Platform for the Accelerated Realization, Analysis, and Discovery of Interface Materials (PARADIM), Cornell University , Ithaca, NY ,
Helmholtz-Zentrum Dresden-Rossendorf ,
Cornell Center for Materials Research, Cornell University , Ithaca, NY ,
Institute of Quantum Optics and Central Facility Materials Science Electron Microscopy, Ulm University ,
Corporate Analytical Laboratories, Taiwan Semiconductor Manufacturing Company , Hsinchu ,
Advanced Semiconductor Materials (ASM) America , Phoenix, AZ ,