SIMS Imaging Performed on Focused Ion Beam - based Platforms
Source abstract
Abstract
Jean-Nicolas Audinot, Alexander D Ost, Charlotte Stoffels, Patrick Philipp, Olivier De Castro, Antje Biesemeier, Quang Hung Hoang, Tom Wirtz; SIMS Imaging
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Ion-surface interactions and analysis · Advanced Electron Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Luxembourg Institute of Science and Technology (LIST) Advanced Instrumentation for Nano-Analytics (AINA), MRT Department, , Belvaux, Luxembourg
University of Luxembourg , Esch-sur-Alzette, Luxembourg
References (13)
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