Traceable Measurements using a Metrology Scanning Electron Microscope
Source abstract
Abstract
Bradley Damazo, András E Vladár, Olivier Marie-Rose, John Kramar; Traceable Measurements using a Metrology Scanning Electron Microscope, Microscopy and Mic
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Machine Learning in Materials Science · Advanced Materials Characterization Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Microsystems & Nanotechnology Division National Institute of Standards and Technology, , Gaithersburg, MD, USA
LLC Prometheus Computing, , Cullowhee, NC, USA
References (2)
Show source-provided references
1. Vladár · SPIE Proc. Advance Lithography · 200
2. Vladár